Post-Fabrication Trimming of Silicon Photonic Ring Resonators at Wafer-Scale

Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, sensing applications. However, the high sensitivity to fabrication variations has limited their volume manufacturability commercial adoption. Here, we report a low-cost post-fabrication trimming method tune resonance wavelength of silicon resonator correct at wafer-scale. We use Ge implant create an index trimmable section on-chip heater apply precise localized thermal annealing set its desired wavelength. demonstrate resonators fabricated across 300 mm silicon-on-insulator (SOI) wafer within ±32 pm target 1310 nm, providing viable path high-volume manufacturing opening up new practical applications these devices.